首页> 外文会议>Smart Structures, Devices, and Systems III; Proceedings of SPIE-The International Society for Optical Engineering; vol.6769 >Flame Spray Pyrolysis based nano-structured functional metal oxide layers for gas sensing applications
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Flame Spray Pyrolysis based nano-structured functional metal oxide layers for gas sensing applications

机译:基于火焰喷涂热解的纳米结构功能性金属氧化物层,用于气体传感应用

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摘要

The contribution presents the results obtained in the last years by applying an established aerosol based production technology for metal oxide nanoparticles mainly used in catalysis and filler materials, the so called flame spray pyrolysis (FSP), to gas sensor fabrication. The final achievement of this technology is a fast and clean single step process to fabricate fully functionalized multilayer sensors. This is a substantial progress as it merges the two fundamental processes of producing the sensing material and fabricating the sensing element.
机译:该文稿介绍了过去几年中通过将基于气溶胶的主要氧化金属纳米颗粒的生产技术(主要是催化和填充材料,即所谓的火焰喷雾热解(FSP))应用于气体传感器制造而获得的结果。这项技术的最终成就是快速,清洁的单步工艺,以制造功能齐全的多层传感器。这是一个实质性的进步,因为它融合了生产传感材料和制造传感元件的两个基本过程。

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