首页> 外文会议>Sixth International Symposium on Diamond Materials, 6th, Oct 17-22, 1999, Honolulu, Hawaii >EXAMINATION OF HEXAGONAL PLATELET DIAMOND GROWTH BY ATOMIC FORCE MICROSCOPY
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EXAMINATION OF HEXAGONAL PLATELET DIAMOND GROWTH BY ATOMIC FORCE MICROSCOPY

机译:原子力显微镜检查六角板状钻石的生长

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Due to the harsh environments of CVD diamond reactors, in-situ monitoring of growth using nanotechnology is not possible. Instead, diamond growth was investigated over time using atomic force microscopy (AFM). AFM measurements were taken at 10 minute intervals to analyze the atomic scale processes involved during growth of a {111} diamond platelet. The study used an existing diamond sample with prevalent hexagonal platelet morphology and the same platelets were examined on each occasion by AFM. This study showed that, as crystal growth proceeds, island growth predominates over step propagation. This phenomenon is believed to be the cause for the faceting of diamond crystals, which detracts from diamond film quality. The oxygen in the gas phase reduced the extent of island formation during diamond growth.
机译:由于CVD金刚石反应堆的恶劣环境,无法使用纳米技术进行原位生长监测。取而代之的是,使用原子力显微镜(AFM)研究了金刚石随时间的增长情况。以10分钟为间隔进行AFM测量,以分析{111}金刚石血小板生长过程中涉及的原子尺度过程。该研究使用了具有普遍的六角形血小板形态的现有钻石样品,并且在每次使用AFM检验相同的血小板。这项研究表明,随着晶体生长的进行,岛的生长比台阶的传播更为重要。该现象被认为是导致金刚石晶体刻面的原因,这降低了金刚石膜的质量。气相中的氧气减少了钻石生长过程中岛形成的程度。

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