NANO SURFACE GRINDING OF X-RAY MIRRORS BY LARGE ULTRAPRECISION ASPHERIC OPTICS ELID-GRINDER

摘要

A large ultraprecision aspheric grinding system with ELID (Electrolytic In-Process Dressing) has been developed for the fabrication of large optical elements and components, which can be used in Synchrotron radiation facilities. The machine table measures 1500mm in length and 550mm in width, and rectangular X-ray aspherical mirrors such as troidal and cylindrical mirrors can be fabricated using the developed machine system. The machine can mount different grinding wheels with attachments. An ELID-grinding unit is equipped on the machine, and long term stabilized grinding performance was successfully achieved for SiC, Si, fused silica mirrors and many other hard material mirrors. Three-axes double V shape rollers are used for sliding the machine, and air hydrostatic bearing is used for the grinding wheel spindle. This paper introduces the major specifications of the developed machine, and discusses certain representative applications in the R&D of special optical elements and components such as X-ray reflective optics, and use of a new feed method to Improve the surface roughness of X-ray mirrors with ELID-grinding to obtain nano surface.