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GRINDING OPTIMIZATION MODEL FOR NANOMETRIC SURFACE ROUGHNESS FOR ASPHERIC ASTRONOMICAL OPTICAL SURFACES

机译:非球体天文光学表面的纳米表面粗糙度研磨优化模型

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摘要

Bound abrasive grinding is used for the initial fabrication phase of the precision aspheric mirrors for both space and ground based astronomical telescopes. We developed a new grinding optimization process that determines the input grinding variables for the target surface roughness, checks the grinding error magnitude in resulting surface roughnesses, and minimizes the required machining time. Using the machining data collected from the previous grinding runs and subsequently fed into the multi-variable regression engine, the process has the evolving controllability that suggests the optimum set of grinding variables for each target surface roughness. The process model was then used for ten grinding experiments that resulted in the grinding accuracy of =-0.906 ± 3.38(σ) nm (Ra) for the target surface roughnesses of Zerodur substrate ranging from 96.1 nm (Ra) to 65.0 nm (Ra). The results imply that the quantitative process optimization technique developed in this study minimizes the machining time and offers the nanometric surface roughness controllability superior to the traditional, qualitative, craftsman based grinding process for the astronomical optical surfaces.
机译:结合的磨料磨具用于对空间和基于地面的天文望远镜精度非球面反射镜的初始制造阶段。我们开发了一种新磨削优化过程,用于确定目标表面粗糙度,支票磨削误差幅值在所得的表面粗糙度,并最大限度地减少所需的加工时间的输入磨削变量。使用从先前研磨运行收集,并随后馈送到多变量回归引擎的加工数据,该方法具有不断变化的可控那么就表明该组最佳磨削变量对于每个目标表面粗糙度。然后,该过程模型被用于,导致的磨削精度10个磨削实验= -0.906±3.38(σ)纳米(Ra)为对于微晶玻璃基片,从96.1纳米(Ra)为65.0纳米的目标表面粗糙度(Ra)为。该结果意味着,在本研究中开发的定量过程优化技术最小化了加工时间,并提供所述纳米的表面粗糙度控制性优于用于天文光学表面的传统的,定性的,工匠基于研磨过程。

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