A STUDY ON THE FRACTAL CHARACTERISTIC OF SURFACE TOPOGRAPH WITH A 3D SCANNING PROBE MICROSCOPE (SPM)

摘要

With the development of precision engineering and ultra precision machining, surfaces with nanometer and even sub-nano-meter scale roughness can be produced . But traditional magnitude description of rough surface can't provide the true results. So this paper primarily analysis the surface topograph with 3D dimension from AFM(Atomic Force Microscope) by using fractal geometry to offer the new evaluation parameters. The analysis results lay the foundation for research on the fractal characteristic of rough surface in the future.