Design, Fabrication and Characterization of a New Hybrid Resonator for Biosensing Applications

摘要

A novel optical biosensor realized in SOI technology has been proposed. A preliminary study involving common configurations such as ring- and disk-resonator has been carried out in order to design and then to test the new resonator, which we call hybrid resonator because it shows ring resonator shape and an optical behavior (in terms of Q factor) similar to the one of a disk-resonator. A detection limit of 5 × 10~(-3) RIU has been demonstrated for the detection of glucose inside an aqueous solution.