SensoNor Ultra Stable Silicon Pressure Sensor

摘要

SP82 is a new piezoresistive pressure sensor released in 1999 that is based on a continuous development and improvement of a pressure sensing technology developed by SensoNor in the early 80's. The SP80 series of sensors were initially developed to meet demanding needs set fourth by military application. After the sensor was implemented in military related applications, it found its way into various other commercial applications in need of a stable and reliable pressure sensor. This paper presents the design and the critical processes of the component, as well as measurement results from the qualification program. SP82 delivers long-term stability options of 0.02%FSO/Year or better with repeatability of +-0.005%FSO. By utilizing certain additional compensation methods, some users of SP82 have been able to obtain 0.005%FSO/year stability, an accuracy better than what most available measurement equipment can detect. The sensor contains individual on-chip heating that basically eliminates the need to compensate for temperature effects. The heater control circuit is presented, and the circuit could easily be integrated into a system design or be supplied with the sensor on small PCB or thick film hybrid. SP82 is available in pressure ranges from 7psi to 900psi for absolute, relative and differential measurement. The sensor is a bulk micromachined single crystal silicon device, delivered in TO-8 packaging with excellent media compatibility. The sensor is utilized today in several aerospace products such as flight control systems, air data computers and engine control systems. The sensor has also found its use in accurate pressure instruments, barometric pressure gauges and other transducer applications that need the highest accuracy.