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Direct Cu-on-Ta Electroplating From Ionic Liquids In High Vacuum

机译:在高真空下从离子液体直接电镀铜钽钽

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摘要

Due to their intrinsic ionic conductivity and wide electrochemical window, ionic liquids are interesting non-aqueous electrolytes for the electrodeposition of reactive metals which cannot be deposited from aqueous solutions (1-5). Studies have been made on the electrodeposition of titanium (6-7), tantalum (8-9), magnesium (10), silicon (11), germanium (12), cesium (13) and the rare earths (14), but the most successful and convincing results were obtained for aluminium and some of its alloys (15-26).
机译:由于其固有的离子电导率和宽的电化学窗口,离子液体是用于电沉积活性金属的有趣非水电解质,不能从水溶液中沉积(1-5)。已经对电沉积钛(6-7),钽(8-9),镁(10),硅(11),锗(12),铯(13)和稀土(14)进行了研究,但是铝及其某些合金(15-26)获得了最成功和令人信服的结果。

著录项

  • 来源
  • 会议地点 Vienna(AT);Vienna(AT)
  • 作者单位

    Katholieke Universiteit Leuven, Department of Metallurgy and Materials Engineering,Kasteelpark Arenberg 44 - bus 2450, B-3001 Leuven (Belgium) Electrochemical Society Student member;

    Katholieke Universiteit Leuven, Department of Metallurgy and Materials Engineering,Kasteelpark Arenberg 44 - bus 2450, B-3001 Leuven (Belgium);

    Katholieke Universiteit Leuven, Department of Chemistry, Celestijnenlaan 200F - bus 2404, B-3001 Leuven (Belgium) Electrochemical Society Active member;

    Katholieke Universiteit Leuven, Department of Metallurgy and Materials Engineering,Kasteelpark Arenberg 44 - bus 2450, B-3001 Leuven (Belgium) Katholieke Universiteit Leuven, Department of Chemistry, Celestijnenlaan 200F - bus 2404, B-3001 Leuven (Belgium);

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 半导体技术 ;
  • 关键词

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