Contact Behavior among Vertical Aligned Carbon Nanotube Bumps under compression for Flexible Multilayer Substrates

摘要

The flexible multilayer substrates with vertically aligned Carbon Nanotubes (VACNTs) have been fabricated by using surface activated bonding method. It became clear that, in the fabrication process, the compression of the VACNT bumps have a substantial impact on their properties. As an evaluation and an analysis, the compressed VACNT bumps occurred plastic deformation above certain load. It is considered that the compressed VACNT contacts each other and friction force is created among them. Furthermore, the contact area among VACNTs contributes resistance of VACNT bumps.