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Single facet slotted Fabry-Perrot laser and its application in photonic integrated circuits

机译:单面开槽法布里-珀罗激光器及其在光子集成电路中的应用

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摘要

In this paper, a single facet slotted Fabry-Perrot (FP) laser is demonstrated to provide tunable, single mode operation and has been monolithically integrated into a photonic integrated circuit (PIC) with semiconductor optical amplifiers and a multimode interference coupler. These lasers are designed by incorporating slots into the ridge of traditional FP cavity lasers to achieve single mode output, integrability and tunability. With the feature size of the slots around 1 μm, standard photolithographic techniques can be used in the fabrication of the devices. This provides a time and cost advantage in comparison to ebeam or holographic lithography as used for defining gratings in distributed feedback (DFB) or distrusted Bragg reflector (DBR) lasers, which are typically used in PICs. The competitive integrable single mode laser also enables the PIC to be fabricated using only one epitaxial growth and one etch process as is done with standard FP lasers. This process simplicity can reduce the cost and increase the yield.
机译:在本文中,单面开槽法布里-珀罗(FP)激光器被证明可提供可调谐的单模操作,并已单片集成到具有半导体光放大器和多模干涉耦合器的光子集成电路(PIC)中。这些激光器是通过在传统FP腔激光器的脊中加入缝隙来设计的,以实现单模输出,可集成性和可调性。由于缝隙的特征尺寸约为1μm,因此可以在器件的制造中使用标准的光刻技术。与用于在PIC中通常使用的分布式反馈(DFB)或不信任布拉格反射器(DBR)激光器中定义光栅的电子束或全息光刻相比,这提供了时间和成本优势。与标准FP激光器一样,具有竞争力的可集成单模激光器还使PIC可以仅使用一种外延生长和一种蚀刻工艺来制造。这种工艺的简化可以降低成本并提高产量。

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