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Single facet slotted Fabry-Perrot laser and its application in photonic integrated circuits

机译:单面开槽法布里 - 珀罗激光及其在光子集成电路中的应用

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In this paper, a single facet slotted Fabry-Perrot (FP) laser is demonstrated to provide tunable, single mode operation and has been monolithically integrated into a photonic integrated circuit (PIC) with semiconductor optical amplifiers and a multimode interference coupler. These lasers are designed by incorporating slots into the ridge of traditional FP cavity lasers to achieve single mode output, integrability and tunability. With the feature size of the slots around 1 μm, standard photolithographic techniques can be used in the fabrication of the devices. This provides a time and cost advantage in comparison to ebeam or holographic lithography as used for defining gratings in distributed feedback (DFB) or distrusted Bragg reflector (DBR) lasers, which are typically used in PICs. The competitive integrable single mode laser also enables the PIC to be fabricated using only one epitaxial growth and one etch process as is done with standard FP lasers. This process simplicity can reduce the cost and increase the yield.
机译:在本文中,一个单一的小面开槽法布里 - 佩罗(FP)激光器被证明提供可调谐的,单模式操作,并已单片集成到光子集成电路(PIC)与半导体光放大器和一个多模干涉耦合器。这些激光器是通过将插槽分成传统的FP腔激光器的脊,以实现单模输出,可积性和可调性而设计的。用1μm左右槽的特征尺寸,标准光刻技术可在器件的制造中使用。这提供了时间和成本优势相比,电子束或作为用于在分布反馈(DFB)或不信任的布拉格反射器(DBR)激光器,其通常在使用的PIC限定光栅全息光刻。竞争积单模激光器还使PIC仅使用一种外延生长和一个蚀刻工艺与标准FP激光器进行制造。该过程简单可以降低成本和提高产量。

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