RECIRCULATION AIR-HANDLERS FOR CLEANROOMS-BARE FAN SOUND POWER TO ROOM SOUND PRESSURE

摘要

This paper is an overview of methodology used to predict sound levels of typicalrecirculation air systems for semiconductor and pharmaceutical cleanrooms. We present it fromthe viewpoint of an air-handling system manufacturer responsible for meeting the specified air,sound and vibration performance of recirculation units. We briefly describe the steps involved inproviding reliable sound predictions of the cleanroom sound levels generated by recirculation airsystems. These steps involve the cataloging of bare fan sound power levels, attenuation data ofair-handling unit plenums and sound attenuators, and air flow path attenuation data includingdistribution plenums, ducts, filters and room effects.