Tabletop coherent diffraction imaging with a discharge plasma EUV source

摘要

We present a coherent diffraction imaging (CDI) experiment using a high-frequency discharge plasma based, extreme ultraviolet (EUV) source. By using different illumination geometries, we generated EUV beams witha varying degree of spatial coherence,which were used to produce far field diffraction patterns from test objects. We then successfully reconstructed an illumination wavefront defined by a circular aperture. The present workexplore the feasibility of compact tabletop CDI usinga discharge plasma EUV source emerged from the technology development of EUV lithography, which can potentially find application in nanoscience and metrology.