A Hybrid Silicon-PDMS Micropump Actuated by PZT Bimorph

摘要

The fabrication and characterization of a hybrid Silicon-PDMS micropump based on MEMS technology is presented. The micropump consists of one chamber, two passive valves and one PDMS diaphragm. A PZT bimorph working as the actuator is mounted on the PDMS diaphragm. The use of the PDMS diaphragm and the PZT bimorph can give rise to large displacements of the pump diaphragm, making the micropump more efficient and easier to be fabricated. The flow rate of the micropump is a function to the voltage and frequency of the applied square wave. When a square wave of 100V is applied, a maximum flow rate of 317 μL/min and a back-pressure of 2 kPa are achieved at 20 Hz.