SIMULATION OF TRANSIENT SIGNALS IN MICRO-GALVANIC PROCESSES

摘要

Simulation results of a deposition/machining process by means of a microelectrode as a tool and application of ultra short-pulsed voltages or currents are shown. The simulation of the transients of the Faraday current through the interface of the work piece has been performed with electrical networks based on Pspice® models. A quasi 3-dimensional geometry of a localized galvanic process using a tool with radial symmetry above the surface of a flat work piece was modeled. The influence of the variation of parameters like solution conductivity, charge transfer resistance, double layer capacity, geometry etc. on the Faraday current distribution was investigated. In this work, two cases are presented: One process with exponential and one with resistive charge transfer characteristic. The deposition/dissolution rate is calculated and compared for dc and pulse operation.