High Resolution High Sensitivity RF-Only quadrupole Mass Spectrometry for cluster characterization and Deposition

摘要

Quadrupole mass spectrometers offer unique advantages for the mass analysis of clusters, including spatial separation of species for deposition experiments. The analysis of large clusters requires a very wide mass range mass analyzer. Because increased mass range requires increased mass resolution, and increased mass resolution generally results in decreased transmission, the quadrupole is uaully described as discriminating against high mass. In our laboratory, we have demonstrated that for limited mass range systems (large quadrupoles, high RF frequency) the penalty in transmission for going from RF-only operation to RF-DC operation is minimal (as small as 2-