Vibration Sensor With Optoelectronic Interface

摘要

A micromachined sensor for wear monitoring of rotating machinery is described. It comprises a Si microelectromechanical transducer for vibration sensing, on-chip MOS circuitry for amplification and a hybrid GaAs/GaAlAs infrared emitting diode(IRED) for electro-ortical conversion of the measured signal. Bulk micromachining combined with cmmmon MOS technology is used for transducer fabriccation. In view of a monolithic integration of an IRED heteroepitaxy on Si was investigated.