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Single photon counting integrated circuit operating with CdTe pixel detector

机译:使用CdTe像素检测器的单光子计数集成电路

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CdTe detectors are very good candidate for medical X-ray imaging applications, because of their relatively high atomic number and significant progress in their fabrication process during the last decade. For this reason we built a hybrid pixel detector based on CdTe sensor and the UFXC32k integrated circuit designed in CMOS 130 nm process and operating in a single photon counting mode. The core of the IC is the matrix of 128 × 256 square shaped pixels of 75 μm pitch. Each pixel contains a charge sensitive amplifier, a shaper, a discriminator, correction circuits and two 14-bit counters. The UFXC32k chip was bump-bonded to a pixel CdTe sensor and characterized using X-ray radiation. The measured equivalent noise charge is equal to 125 e-rms for the gain of 33 μV/e-. Thanks to a good quality of bump-bonding process we also managed to obtain a satisfactory X-ray radiograms.
机译:CdTe检测器非常适合用于医学X射线成像应用,因为它们的原子序数相对较高,并且在过去十年中其制造工艺取得了重大进展。因此,我们建立了一个基于CdTe传感器和UFXC32k集成电路的混合像素检测器,该集成电路采用CMOS 130 nm工艺设计,并在单光子计数模式下运行。 IC的核心是间距为75μm的128×256正方形像素的矩阵。每个像素包含一个电荷敏感放大器,一个整形器,一个鉴别器,校正电路和两个14位计数器。将UFXC32k芯片凸点结合到像素CdTe传感器,并使用X射线辐射对其进行表征。对于33μV/ e-的增益,测得的等效噪声电荷等于125 e-rms。由于高质量的凸点焊接工艺,我们还设法获得了令人满意的X射线放射线照片。

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