Pulsed laser deposited-PZT based MEMS energy harvesting devices

摘要

PZT thin films are a huge attraction in the rapid growing MEMS field, especially in the field of energy harvesting. This paper describes the PLD deposited PZT thin film growth and its integration into MEMS energy harvesting devices. We have shown a maximum power output of 51 μW with 63.6 μW/g² sensitivity for a sinusoidal input excitation. The potential applications of these vibrational harvesters in car tires are explored by applying a shock input excitation.