Design of Super-precision Micro-feed Tool Carrier Based on GMM

摘要

The micro-feed tool carrier drived by GMM has a lot of merits such as large feed force, high displacement resolution,wide displacement range and connected with machine tool expediently and rapidly,it surmounts the shortcoming of the PZT driver such as its excursion of the PZT's terrace structure and its intricate structure avoiding creepage for the PZT working in high voltage situation.When the magnetic field is changed, nano-metric displacement output is realized by the micro-feed tool carrier. So the application prospects for the micro-feed tool carrier drived by GMM used in the field of Super-precision manufacturing is extensive.