MAGNETIC LEVITATION SOLUTION TO PRECISION PLANAR MOTION: SINGLE-STAGE AND TWIN-STAGE

摘要

Magnetically levitated (maglev) motion stages have many advantages for precision applications, such as being freedom from friction and contamination, vacuum compatibility, low inertia, high acceleration, high speed, and high precision. One class of maglev motion stages are linear maglev stages, where the moving element is capable of long stroke motion in one degree of freedom (DoF) with very limited motion in the other 5 DoF. One of the earliest demonstrated levitated planar stages is described in, and is capable of cm-level strokes in two in-plane axes.