Nano Patterning on Surfaces of 3-D Micro Structures by Means of Block Copolymer Self Assembly

摘要

In this paper, we present the possibility of nano-scale patterning on surfaces of 3-D micro structures by means of block copolymer self assembly. We succeeded in forming vertical cylinders on the surfaces of the 3-D micro structures using dip-coat process with Au deposition instead of random copolymers. The material of 3-D structures fabricated by FIB-CVD was diamond-like carbon (DLC) due to selecting phenanthrene as a gas source. Since the surface energy of DLC is low, instead of PS-r-PMMA polymer brush, 100 nm-thick Au films were coated on the surfaces of 3-D structures. PS-b-PMMA (PS:PMMA = 50 kg/mol:21 kg/mol) was dip-coated on the Au coated surfaces and annealed. First, we prepared DLC 60° angled slope with size of 2.5 by 3 μm~2. As a result, the vertical cylinders were formed in a similar way regardless of the places, i.e., top, middle and bottom on the slopes, vertical cylinders were formed regularly and densely on the entire slope. In order to investigate the effect of slope angle, we prepared 3-D micro structures with different angled slopes such as 70, 80 and 90°. There was no slope angle specific difference, and vertical cylinders were also formed on each slope.