THE FORMATION OF ZINC AND COPPER OXIDES THIN FILMS FOR HETEROSTRUCTURE SOLAR CELLS

摘要

Optical and electrical properties (Haze spectra, carrier concentration, mobility, resistivity) of zinc oxide thin films deposited on glass substrates were studied by plasma treatment and by thermal annealing. Films of copper oxides on the glass and CuO/ZnO structures were formed by vacuum deposition of copper films followed by thermal annealing in air. Optical and structural properties of the CuO films and electrical properties of ZnO/CuO structures were investigated upon thermal treatment. It is shown that a photosensitive n-ZnO/p-CuO heterojunction may be formed by rapid (～1 min) thermal processing in air.