Camera-based micro interferometer for distance sensing

摘要

Interference of light provides a high precision, non-contact and fast method for measurement method for distances. Therefore this technology dominates in high precision systems. However, in the field of compact sensors capacitive, resistive or inductive methods dominates. The reason is, that the interferometric system has to be precise adjusted and needs a high mechanical stability. As a result, we have usual high-priced complex systems not suitable in the field of compact sensors. To overcome these we developed a new concept for a very small interferometric sensing setup. We combine a miniaturized laser unit, a low cost pixel detector and machine vision routines to realize a demonstrator for a Michelson type micro interferometer. We demonstrate a low cost sensor smaller 1cm3 including all electronics and demonstrate distance sensing up to 30 cm and resolution in nm range.