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Optoelectronic device for the measurement of the absolute linear position in the micrometric displacement range

机译:用于在微位移范围内测量绝对线性位置的光电装置

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In this work, an optoelectronic device that provides the absolute position of a measurement element with respect to a pattern scale upon switch-on is presented. That means that there is not a need to perform any kind of transversal displacement after the startup of the system. The optoelectronic device is based on the process of light propagation passing through a slit. A light source with a definite size guarantees the relation of distances between the different elements that constitute our system and allows getting a particular optical intensity profile that can be measured by an electronic post-processing device providing the absolute location of the system with a resolution of 1 micron. The accuracy of this measuring device is restricted to the same limitations of any incremental position optical encoder.
机译:在这项工作中,提出了一种光电装置,该光电装置在接通时提供相对于图案比例尺的测量元件的绝对位置。这意味着在系统启动后无需执行任何类型的横向位移。光电器件基于穿过狭缝的光传播过程。尺寸确定的光源可保证构成我们系统的不同元件之间的距离关系,并允许获得特定的光强度曲线,该光强度曲线可通过电子后处理设备进行测量,从而为系统的绝对位置提供分辨率为1微米该测量设备的精度受任何增量位置光学编码器相同的限制。

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