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Optoelectronic device for the measurement of the absolute linear position in the micrometric displacement range

机译:光电器件用于测量微米位移范围内的绝对线性位置

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In this work, an optoelectronic device that provides the absolute position of a measurement element with respect to a pattern scale upon switch-on is presented. That means that there is not a need to perform any kind of transversal displacement after the startup of the system. The optoelectronic device is based on the process of light propagation passing through a slit. A light source with a definite size guarantees the relation of distances between the different elements that constitute our system and allows getting a particular optical intensity profile that can be measured by an electronic post-processing device providing the absolute location of the system with a resolution of 1 micron. The accuracy of this measuring device is restricted to the same limitations of any incremental position optical encoder.
机译:在这项工作中,呈现了一种光电子器件,其在接通时提供相对于图案比例的测量元件的绝对位置。这意味着在系统启动后没有必要在系统启动后执行任何类型的横向位移。光电器件基于通过狭缝的光传播的过程。具有明确尺寸的光源可确保构成我们系统的不同元件之间的距离的关系,并且允许获得可以通过提供系统的绝对位置的电子后处理设备来测量的特定光学强度分布1微米。该测量装置的精度仅限于任何增量位置光学编码器的相同限制。

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