High-Q filled slot photonic crystal cavities on SOI for hybrid photonics

摘要

The design, fabrication, and the experimental realization of high-Q slot photonic crystal cavities on SOI infiltrated by a liquid are reported. Loaded Q-factor of 23,000 is measured at telecom wavelengths. The intrinsic quality factor inferred from the transmission spectrum is higher than 200,000 whereas the maximum of intensity of the cavity is as high as 20% of the light transmitted in the waveguide in the bandpass wavelength range. This result makes the demonstrated filled slot photonic crystal cavities very promising for the integration of various active materials for light amplification, nonlinear optics, or sensing.