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Self-Collimation in Three-Dimensional Photonic Crystals

机译:三维光子晶体中的自准直

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In this paper we present self-collimation in three-dimensional (3D) photonic crystals (PhCs) consisting of a simple cubic structure. By exploiting the dispersive properties of photonic crystals, a cubic-like shape equi-frequency surface (EFS) is obtained. Such surfaces allow for structureless confinement of light. Due to the degeneracy of propagation modes in a 3D structure, self-collimation modes can be distinguished from other modes by launching a source with a particular polarization. To this end, we found that polarization dependence is a key issue in 3D self-collimation. The results hold promise for high-density PhCs devices due to the lack of structural interaction. Finally, a novel method for the fabrication of three-dimensional (3D) simple cubic photonic crystal structures using conventional planar silicon micromachining technology is presented. The method utilizes a single planar etch mask coupled with time multiplexed sidewall passivation and deep anisotropic reactive ion etching in combination with isotropic etch processes to create three-dimensional photonic crystal devices. Initial experimental results are presented.
机译:在本文中,我们介绍了由简单立方结构组成的三维(3D)光子晶体(PhC)中的自准直。通过利用光子晶体的色散特性,获得了立方形状的等频表面(EFS)。这样的表面允许光的无结构限制。由于3D结构中传播模式的简并性,可以通过发射具有特定偏振的光源将自准直模式与其他模式区分开。为此,我们发现偏振依赖性是3D自准直中的关键问题。由于缺乏结构相互作用,该结果有望用于高密度PhC器件。最后,提出了一种使用常规平面硅微加工技术制造三维(3D)简单立方光子晶体结构的新颖方法。该方法利用单个平面蚀刻掩模,结合时分复用侧壁钝化和深各向异性反应性离子蚀刻,并与各向同性蚀刻工艺相结合,以创建三维光子晶体器件。提出了初步的实验结果。

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