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Two-Dimensional Bragg Reflectors Fabricated in IOG1 Phosphate Glass using Multi-beam UV-laser Interference

机译:使用多光束紫外激光干涉在IOG1磷酸盐玻璃中制造的二维布拉格反射镜

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摘要

The two-dimensional periodic patterning of a high performance, rare-earth doped phosphate glass is presented here. A two step patterning method is adopted, wherein high damage is induced into the glass volume by exposure to intense ultraviolet pulsed, laser radiation and subsequently, a chemical development in a strong alkali, selectively etches the exposed areas. A four beam interferometric setup is used for defining the two-dimensional periodic pattern on the sample surface. The method presented here produces relief structures of high smoothness, free of debris or defects, and without extensive optical damage, compared to other approaches. The Bragg gratings imprinted here, are tuned for reflection operation in the 1.5 μm band, having periodicities of the order of 500nm. The glass patterned is the phosphate glass IOG1, fabricated by Schott USA and codoped with Er and Yb. The exposures were performed by using the output of a high coherence 213nm, 150ps Nd:YAG laser; while the chemical developing was carried out in aqueous KOH solution. The inscribed periodic structures are characterized by means of diffraction efficiency, and surface topology by employing SEM and AFM scans. Issues related with the interferometric and wet etching processes are also presented and discussed.
机译:此处介绍了高性能稀土掺杂磷酸盐玻璃的二维周期性图案。采用两步图案化方法,其中通过暴露于强紫外线脉冲,激光辐射以及随后在强碱中的化学显影,选择性地蚀刻暴露的区域而对玻璃体积产生高损伤。四束干涉仪用于定义样品表面的二维周期性图案。与其他方法相比,此处介绍的方法产生的浮雕结构具有很高的平滑度,没有碎屑或缺陷,并且没有广泛的光学损伤。调整此处印制的布拉格光栅,使其在1.5μm波段内进行反射操作,并具有5​​00nm数量级的周期性。图案化的玻璃是磷酸盐玻璃IOG1,该玻璃由Schott USA制造并与Er和Yb共掺杂。通过使用213nm高相干,150ps Nd:YAG激光的输出进行曝光。化学显影是在KOH水溶液中进行的。刻划的周期性结构的特征在于衍射效率,以及通过采用SEM和AFM扫描的表面拓扑。还介绍和讨论了与干涉和湿法蚀刻工艺有关的问题。

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