Guided-wave Si CMOS Process-compatible Optical Interconnects

摘要

We report the formation of polyimide-based Htree waveguides for a multi-GBit/sec optical clock signal distribution in al Si CMOS process compatible environment. Such a clock distribution system is to repalce the existing electronic counterpatr associated with high-speed supercomputers such as Cray T-90machine. A waveguide propagation loss of 0.21 dB/cm at 850 nm was experimentally confirmed for the 1-to-48 waveguide fanout device. The planarization requirement of the optical interconnection layer among many electrical interconnection layers makes the employment of tilted grating a choice of desire. Theoretical calculation predicts the 1-to-1 free-space to waveguide coupling with an efficiency as high as 95