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Growth of CaFeO_x/LaFeO_3 Superlattice on SrTiO_3(100) Substrates

机译:CarO_x / LaFeO_3超晶格在SrTiO_3(100)衬底上的生长

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摘要

The CaFeO_x(CFO) and LaFeO_3(LFO) thin films as well as superlattices were fabricated on SrTiO_3(100) substrates by pulsed laser deposition (PLD) method. The tetragonal LFO film grew with layer-by-layer growth mode until approximately 40 layers. In the case of CFO, initial three layers showed layer-by-layer growth, and afterward the growth mode was transferred to two layers-by-two layers (TLTL) growth mode. The RHEED oscillation was observed until the end of the growth, approximately 50nm. Orthorhombic twin CaFeO_(2.5) (CFO2.5) structure was obtained. However, it is expected that the initial three CFO layers are CaFeO_3 (CFO3) with the valence of Fe~(4+). The CFO and LFO superlattice showed a step-terraces surface, and the superlattice satellite peaks in a 2θ-θ and reciprocal space mapping (RSM) x-ray diffraction (XRD) measurements, indicating that the clear interfaces were fabricated.
机译:通过脉冲激光沉积(PLD)方法在SrTiO_3(100)衬底上制备了CaFeO_x(CFO)和LaFeO_3(LFO)薄膜以及超晶格。四方LFO膜以逐层生长模式生长,直到大约40层。在CFO的情况下,最初的三层显示逐层生长,然后将生长模式转换为两层两层(TLTL)生长模式。观察到RHEED振荡直至生长结束,大约50nm。获得了斜方晶双CaFeO_(2.5)(CFO2.5)结构。然而,可以预期的是,最初的三个CFO层是具有Fe〜(4+)价的CaFeO_3(CFO3)。 CFO和LFO超晶格显示阶梯状表面,并且超晶格卫星在2θ-θ和互易空间映射(RSM)X射线衍射(XRD)测量中达到峰值,表明已制造出清晰的界面。

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  • 来源
    《Oxide nanoelectronics》|2010年|p.125-130|共6页
  • 会议地点 Boston MA(US);Boston MA(US)
  • 作者单位

    CST, Nihon Univ., 7-24-1 Narashinodai, Funabashi-shi, Chiba 274-8501, Japan;

    MESA+ Institute for Nanotechnology, Univ. of Twente, 7500AE Enschede, The Netherlands;

    MESA+ Institute for Nanotechnology, Univ. of Twente, 7500AE Enschede, The Netherlands;

    CST, Nihon Univ., 7-24-1 Narashinodai, Funabashi-shi, Chiba 274-8501, Japan;

    MESA+ Institute for Nanotechnology, Univ. of Twente, 7500AE Enschede, The Netherlands;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 半导体技术;
  • 关键词

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