Fabrication and Characterization of PDMS Thin Film

摘要

Because PDMS is viscous, it's impossible to form thin films of PDMS using spin coating without dilute it with solvents. We examine the optimal solvents and spin parameters for spin-coating the PDMS elastomer on glass substrates. Chloroform, Benzene, and Toluene have been attempted to study the influences of solvent on forming thin films of high uniformity. The experiments conclude: the solvent with lower evaporation rate produces more uniform films. No strong relationship between spin speeds and film uniformity has been observed when spin speed is high. However, the film uniformity begins to decline when lower spin speed is used. In addition, we find that the refractive index of the thin film can be modified by curing temperature.