Development of a Compact, High Load PZT-Ceramic, Long-Travel, Linear Actuator with Picometer Resolution for Active Optical Alignment Applications

摘要

This paper describes a high-force PZT-ceramic based linear actuator for long-travel, high resolution applications. Different modes of operation offer high bandwidth dither, step and constant velocity slew motion. The drive is self-locking and does not expend energy to hold a position. This development was originally undertaken for applications in the semiconductor industry and mature serial production actuators are now embedded in machinery to actively collimate heavy optic assemblies weighing 10's of kg in multiple axes with nanometer resolution.