Simulation of Thermoelastic Damping of MEMS Mirror Using a finite element analysis

摘要

The design of MEMS mirror with a high quality factor is essential for many MEMS applications. Our paper deals with the simulation and analysis of thermoelastic damping of the MEMS mirror based on the finite element method. Four models of MEMS mirrors are designed with various geometries. For each model, the eigenfrequency of the thermoelastic damping is investigated compared to the eigenfrequency without damping. The quality factor (Q) is discussed with a variety of geometric parameters which may affect the Q factor. The best model among the four is presented.