ON-CHIP CHARACTERIZATION OF FLUIDS USING MICRO SURFACE PLASMON RESONANCE SENSORS

摘要

The design of a Micro Surface Plasmon Resonance Sensor is proposed. The possibility of implementing the modified Kretschmann-Raether scheme on a chip is investigated. A moving waveguide is used to change the angle of incidence of the beam of light. The main advantages of this sensor are potentially low cost, simplicity of design and very high parallelization. It is possible to have large number of such sensors on one chip, each of them with distinct activated sensing surfaces. The modeling of the sensor, design optimization procedures, and fabrication are also discussed. Computer simulations are used to validate the design.