A High-Frame-Rate DUV-Optimized CCD for Simultaneous Measurements of Illumination Intensity, Polarization Amplitude, and Polarization Direction for Very-High NA Imaging Systems

摘要

Lincoln Laboratory has designed and fabricated a charge-coupled device (CCD) array capable of imaging both polarization and illumination uniformity. The device consists of an 1107-element linear array of UV-optimized silicon photodiodes read out by a three-stage CCD through a single ～1-MHz output amplifier. This yields an effective clock rate for the whole array of ～1 kHz. Each of the active diode surfaces within the 1107-element array is covered by a UV-opaque layer of polysilicon into which are patterned 140-nm, transmissive sampling slits. The orientation and location of the slits allows simultaneous determination of illumination uniformity, degree and direction of polarization, and polarization uniformity. The device was tested with a 193-nm excimer laser equipped with variably polarized illumination and the theoretical performance of the device was supported by finite-difference time domain optical simulations.