A New Polishing Process for Large-aperture and High-precision Aspheric Surface

摘要

The high-precision aspheric surface is hard to be achieved due to the mid-spatial frequency error in the finishing step. The influence of mid-spatial frequency error is studied through the simulations and experiments. In this paper, a new polishing process based on magnetorheological finishing (MRF), smooth polishing (SP) and ion beam figuring (IBF) is proposed. A 400mm aperture parabolic surface is polished with this new process. The smooth polishing (SP) is applied after rough machining to control the MSF error. In the middle finishing step, most of low-spatial frequency error is removed by MRF rapidly, then the mid-spatial frequency error is restricted by SP, finally ion beam figuring is used to finish the surface. The surface accuracy is improved from the initial 37.691nm (rms, 95% aperture) to the final 4.195nm. The results show that the new polishing process is effective to manufacture large-aperture and high-precision aspheric surface.