Excimer laser micro-machining optimization using beam homogenizers based optical system

摘要

This paper describes the experimental results in micro-machining technology which were performed by using a 248 nm KrF excimer laser, beam homogenizers, mask image, projection lens and a five axis computer numerical controlled (CNC) equipment. The optical system is composed by two beam homogenizers of different focal lengths, a condenser lens that takes and reshapes the laser beam, the field lens that collimates the beam, the mask that defines the image and the projection lens. The shape of the mask is kept identical on the target in the micrometric scale. The components which were manufactured are intended to be used to develop micro-motors and gyroscopes.