Miniaturized NIR scanning grating spectrometer for use in mobile phones

摘要

An extremely miniaturized scanning grating spectrometer at the size of a sugar cube has been developed at Fraunhofer IPMS. To meet the requirements for the integration into a mobile phone a new system approach has been pursued. The key component within the system is a silicon-based deflectable diffraction grating with an integrated driving mechanism. A first sample of the new spectrometer was built and characterized. It was found to have a spectral range from 950 nm to 1900 nm at a resolution of 10 nm. The results show that the performance of the new MEMS spectrometer is in good agreement with the requirements for mobile phone integration.