首页> 外文会议>NATO Advanced Research Workshop on Nanostructured Films and Coatings Santorini, Greece June 28-30, 1999 >Preparation and Characterisation of Metallic Thin Films for electroluminescent Devices Based on Porous Silicon
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Preparation and Characterisation of Metallic Thin Films for electroluminescent Devices Based on Porous Silicon

机译:基于多孔硅的电致发光器件金属薄膜的制备与表征

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摘要

For porous silicon (PS) electroluminescent (EL) devices, metallisation is a key process. The state of the art of the main preparation methods of thin metallic films used in PS EL devices is described. Experimental results concerning the structural and electrical characterisation of the metal/PS/p-Si structures are also presented. Different materials, like Au, In, Au-In, In-Sn, Al, etc., in a variety of preparation conditions were used as a solid-state contact on the PS layers. The luminescent properties of these structures were checked after metallic layer deposition by exciting the samples with an UV lamp. It is known that the transparency of a thin layer of 15 nm thickness is 60
机译:对于多孔硅(PS)电致发光(EL)器件,金属化是关键过程。描述了用于PS EL器件的金属薄膜的主要制备方法的现有技术。还介绍了有关金属/ PS / p-Si结构的结构和电特性的实验结果。在各种制备条件下,将不同材料(例如Au,In,Au-In,In-Sn,Al等)用作PS层上的固态触点。在金属层沉积后,通过用紫外线灯激发样品来检查这些结构的发光特性。众所周知,厚度为15 nm的薄层的透明度为60

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