DEVELOPMENT OF COATING TECHNOLOGIES USING NANO PARTICLES

摘要

Two kinds of coating technologies using nano particles were introduced. One is a deposition of nano particles by the gas deposition method; the other is a coating process with nano particles solution. Jet Printing System has been successfully developed for industrial usage based on the gas deposition method. Various kinds of metallic films are effectively formed by the system and the properties of metallic film are suitable for practical usage. Formation of nano particles by laser irradiation has been studied. Tungsten nano particles were successfully formed and the distributions of particle size were analyzed by the low-pressure differential mobility analyzer. Further study is now in progress. Aerosol Jet Printing System supplies a new method to prepare easily ceramic film several tenth of um thick. Jet Printing System is, Ⅰ) a dry process, ⅱ) a low temperature process, ⅲ) a maskless process, and ⅳ) a clean process. Dispersed nano particles solution has been successfully developed to make thin films. The particles with a size of less than 10 nm are suspended in an organic solvent without aggregations. The process has the following advantages: (a) the metallization can be done at a low temperature of about 300℃ while general paste needs much higher baking temperature, more than 600℃; (b) It is possible to fill fine trenches or holes with 0.18μm in width; (c) The films have a high purity without alkali metal nor sulfur contamination.