Experimental Study of Texture and self-Polarization of Sol-Gel Derived Pzt Thin Films

摘要

Pb(Zr,Ti)O_3 (PZT) thin films have been reported to show a significant polarization after deposition without any previous poling treatment which is referred to as self-polarization. This effect has also been found in the here derived PZT thin films using a sol-gel method. the aim of this experimental work was to study the influence of Ti/Pt bottom electrodes on the texture and polarization of sol-gel PZT films. The Pt films showed a complete (111) texture. Ti diffused along Pt grain boundaries during pre-annealing of the Ti/Pt electrode and formed TiO_2 elevations on the Pt surface. The TiO_2 elevations strongly affected the PZT film texture.