Chapter 41 Electrochemical Sensors for the Detection of Hydrogen Prepared by PLD and Sol-Gel Chemistry

摘要

Two different series of H_2 sensors were prepared. The first series was based on n-type semiconducting SnO2 thin films, prepared by the sol-gel method. The effect of Au and Pt nanoparticles in SnO_2 was investigated for gas sensor applications. The second series was based on p-type NiO thin films, which were grown by pulsed laser deposition on microscope glass or (100) Si substrates. The effect of substrate temperature and O_2 pressure during the deposition process on the morphological and sensing properties of the films has been investigated. The films were fully characterized. A significant response to a broad range of hydrogen concentrations was demonstrated for both series of films at operating temperatures lower than 200℃.