A novel integrated micro-scale closed synthetic-jet-like flow field as gas lubrication in MEMS devices

摘要

The friction and wear problems have remarkably affected the reliability of Micro-Electro-Mechanical System (MEMS) devices. We present, for the first time, a novel integrated micro-scale closed synthetic-jet-like flow field, which provides a velocity-orientation-constant flow in an enclosure, being available as gas lubrication of the motion parts of MEMS devices to solve the friction problem. Based on a specific pyramid structure we work out, this novel method is applied to a practical rotary electrostatic side drive motor, and is theoretically proved to be effective.