Fabrication of micro temperature sensor and heater in a stainless steel-based micro reformer

摘要

Among those problems regarding use of micro reformers that have not yet been solved include reducing their size, decreasing the amount of CO and combining the fuel cell, among others. Therefore, in this work, a micro temperature sensor and a heater are combined inside a stainless steel-based micro reformer to measure the temperature, to improve performance and minimize the concentration of CO. Micro-electro-mechanical-systems (MEMS) of the micro channel type are fabricated on a stainless steel substrate to enhance the methanol conversion ratio. A micro temperature sensor and a heater are placed separately inside a micro reformer. The main advantages of micro temperature sensors are their higher accuracy and sensitivity than those of a traditional thermocouple. Micro temperature sensors and heaters have not been applied in micro reformers and commercial products. Hence, this investigation proposes a novel approach for integrating a micro temperature sensor and a heater in a stainless steel-based micro reformer, to minimize size and optimize performance.