Reflectivity measurements of Ni/V Ni/Ti and W/C multilayer mirrors in the 2-6nm wavelength region using synchrotron radiation

摘要

Abstract: Recent progress in the fields of physical vapor deposition (PVD), coupled with increased interest in the soft x-ray region of the electromagnetic spectrum, has driven the development of layered synthetic microstructures (LSMs) to the point that useful nongrazing incidence optics based on this technology are used in a variety of applications (e.g., solar astronomy, soft x-ray microscopy, and plasma spectroscopy). Our goal, as a production facility for thin film devices, was to demonstrate the capability for surement at 0.154 nm (CuK$alpha@). !17