Metrology of x-ray optics utilizing shearing interferometric techniques

摘要

Abstract: This paper discusses the optical testing of extreme grazing incidence mirror systems and normal incidence high-precision mirror systems during fabrication processing of the optical substrates. The optical metrology is closely coupled with an advanced material removal process that is discussed in terms of the optical metrology. Interferometric data is presented of the optical surfaces. Surface roughness data is shown and discussed. !6