Abstract: Micro-Electro-Mechanical System (MEMS) is an emerging technology based on Micro-Electronics and Micro-Mechanics. Rapid Prototyping Technology plays a very important role on developing MEMS. However, the traditional Prototyping Machines-based Rapid Prototyping Technology can not meet the needs for MEMS product design. Therefore, the approach of applying Virtual Reality into Rapid Prototyping design for MEMS is put forward in this paper. Virtual assembly and virtual operation of MEMS is the key problem in realizing its Rapid Prototyping design, steps for MEMS' Rapid Prototyping design in virtual environment is given in this paper. Finally, some experimental results of classic MEMS device micromotor is given as an example.!7
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