Efficient simulation techniques for complicated micromachined devices

摘要

In this short paper, we briefly describe techniques currently used for simulating micromachined devices. We first survey the fast 3-D solvers that make possible fluid and field analysis of entire micromachined devices and then describe efficient techniques for coupled-domain simulation. We describe the matrix-implicit multilevel-Newton method for coupling solvers which use different techniques, and we describe a mixed-regime approach to improve the individual solver's efficiencies. Several micromachined device examples are used to demonstrate these recently developed methods.