Abstract: Binary gratings with feature sizes smaller than the illumination wavelength were fabricated in quartz glass by means of microstructuring techniques. Using rigorous coupled wave analysis polarization elements like polarizing beam splitters and phase retardation plates were designed for operation in transmission at the wavelength of 650 nm. High frequency polarization gratings with feature sizes down to 140 nm and aspect ratios up to 7 were realized. For the polarization selective beam splitting elements we measured diffraction efficiencies of about 80% in the $MIN@1$+st$/ order for TE polarization, and 90% in the 0$+th$/ order for TM polarization. The values are in good agreement with the theoretical values. Furthermore we realized phase retarding elements e.g. $lambda@/8-plates which showed a phase difference of $Phi $EQ 44.8$DGR ($Phi$-theor.$/ $EQ 45$DGR@) between TE and TM polarized light. The design and the fabrication process as well as the optical properties of our high frequency binary phase gratings will be presented. Experimental results will be compared with theoretical values.!12
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